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High Precision Quartz Glass Reticle Photolithography Reticle
High Precision Glass Reticle
,Quartz Glass Reticle
,Glass Photolithography Reticle
|
Parameter Information |
ordinary precision |
high precision |
|
Material |
Soda glass/quartz glass/customized |
Quartz glass |
|
Maximum External Dimensions |
Thickness related/228.6*228.6mm |
127*127mm |
|
Minimum External Dimensions |
1*1mm |
2*2mm |
|
Maximum Pattern Size |
Thickness related 218.6*218.6/280*280mm |
121*121mm |
|
Flatness |
Size related/conventional 10 μ m |
Size related |
|
Density Value |
Yellow chromium and bright chromium are generally ≥ 3.0/maximum ≥ 6.0; Blue chromium ≥ 5.0 |
/ |
|
Thickness (Customizable) |
0.2/0.33/0.5/0.7/1/1.1/1.5/1.6/2/2.3/3mm |
2.3mm |
|
Position Accuracy |
Conventional 2 μ m/maximum 1 μ m |
0.5μm |
|
Line Width Accuracy |
Conventional 0.2 μ m/maximum 0.1 μ m |
0.05μm |
|
Minimum Line Width |
Conventional 2 μ m/maximum 1 μ m |
0.5μm |
|
Minimum Diameter |
Conventional 2 μ m/maximum 1 μ m |
0.5μm |
High Precision Quartz Glass Reticle Photolithography Reticle
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