High Precision Quartz Glass Reticle Photolithography Reticle
High Precision Glass Reticle
,Quartz Glass Reticle
,Glass Photolithography Reticle
2. Basic Structure and Materials
(1) Concentric circle patterns (usually accompanied by crosshairs) are typically created on the surface of a transparent optical substrate (such as optical glass, quartz, etc.) using vacuum coating (such as a high-reflectivity chromium film) or photolithography.
(2) Transmissive Design: This means it primarily operates in the transmission light path, allowing light to pass through the transparent area for imaging. Depending on the process, it can be divided into positive reticles (the pattern itself is an opaque chromium layer) and negative reticles (the pattern area is left open for light transmission, while the rest is coated).
(3) Size Specifications: The rings usually have fixed diameter spacing (e.g., 0.5 mm, 1 mm, etc. per level) and are numbered or have a central crosshair to aid alignment.
3. Main Application Scenarios
(1) Microscope System Calibration: Quickly calibrating the magnification correspondence after changing objectives and correcting measurement reading deviations is a commonly used calibration tool for routine laboratory tests.
(2) Optical System Alignment: Serves as a beam collimation target, assisting in laser optical path coaxiality adjustment and quickly determining whether the beam coincides with the system's optical axis center.
(3) Industrial Vision Calibration: Used for camera radial distortion correction, providing sub-pixel-level positioning references, widely applied in semiconductor wafer defect detection, PCB board hole coordinate measurement, and other scenarios.
(4) Precision Optical Instrument Support: Installed on the image plane of sights and telescopes, assisting in target center alignment and angular deviation measurement.
4.Main Parameter Information
|
Parameter Information |
ordinary precision |
high precision |
|
Material |
Soda glass/quartz glass/customized |
Quartz glass |
|
Maximum External Dimensions |
Thickness related/228.6*228.6mm |
127*127mm |
|
Minimum External Dimensions |
1*1mm |
2*2mm |
|
Maximum Pattern Size |
Thickness related 218.6*218.6/280*280mm |
121*121mm |
|
Flatness |
Size related/conventional 10 μ m |
Size related |
|
Density Value |
Yellow chromium and bright chromium are generally ≥ 3.0/maximum ≥ 6.0; Blue chromium ≥ 5.0 |
/ |
|
Thickness (Customizable) |
0.2/0.33/0.5/0.7/1/1.1/1.5/1.6/2/2.3/3mm |
2.3mm |
|
Position Accuracy |
Conventional 2 μ m/maximum 1 μ m |
0.5μm |
|
Line Width Accuracy |
Conventional 0.2 μ m/maximum 0.1 μ m |
0.05μm |
|
Minimum Line Width |
Conventional 2 μ m/maximum 1 μ m |
0.5μm |
|
Minimum Diameter |
Conventional 2 μ m/maximum 1 μ m |
0.5μm |